Webster's Online Dictionary
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Specialty Expressions: EPITAXIAL SUSCEPTOR

ExpressionsDomainDefinition
Epitaxial susceptorElectrical EngineeringA conductive block of graphite on which substrate slices rest during an epitaxial-growth process, heated by high-frequency power dissipation induced in coupling coils from a generator. Source: European Union. (references)

Source: compiled by the editor from various references; see credits.

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