| Webster's Online Dictionary |
| Expressions | Domain | Definition | |
| Epitaxial spacer | Electrical Engineering | A sheet of refractory material, sometimes used to separate substrate slices from the susceptor in an epitaxial reactor system in order to prevent contamination and possible sticking of the substrate slices to the support. Source: European Union. (references) | |
Source: compiled by the editor from various references; see credits. | Top | ||
